We have extensive experience in generating and diagnosing plasma sources for radiation generation from the visible through UV, EUV, XUV and x-rays. We design and carry out experimental research for developing and characterizing new radiation sources for lithography, metrology and microscopy

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All our researchers have a Ph.D. in plasma physics and related subjects, and are experts at designing and building successful experiments, analyzing data to extract plasma parameters, and comparing those parameters to physics models.

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Images are taken from our recent work with KLA, published in the Journal of Applied Physics - click here for the paper